Functional Modules
This is a demo page for add-on functional modules that mount to interface panels.
Examples (demo)
- ⚡ Electrical: biasing, heaters, probes
- 💧 Fluidic: cooling loops, dosing
- 💨 Pneumatic / Gas: MFCs, dosing manifolds
- ⚙️ Mechanical: stages, motion feedthroughs
Integration checklist (demo)
- Define vacuum requirements (base / process pressure)
- Define utilities (power, flow, control signals)
- Define control interface (manual vs software)