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Functional Modules

This is a demo page for add-on functional modules that mount to interface panels.

Examples (demo)

  • ⚡ Electrical: biasing, heaters, probes
  • 💧 Fluidic: cooling loops, dosing
  • 💨 Pneumatic / Gas: MFCs, dosing manifolds
  • ⚙️ Mechanical: stages, motion feedthroughs

Integration checklist (demo)

  • Define vacuum requirements (base / process pressure)
  • Define utilities (power, flow, control signals)
  • Define control interface (manual vs software)